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portada Handbook of Silicon Based Mems Materials and Technologies (Micro & Nano Technologies) (Micro and Nano Technologies)
Type
Physical Book
Publisher
Author
Language
English
Format
Hardcover
ISBN13
9780323299657
Edition No.
0002

Handbook of Silicon Based Mems Materials and Technologies (Micro & Nano Technologies) (Micro and Nano Technologies)

Markku Tilli Mervi Paulasto-Krockel Teruaki Motooka Professor Veikko Lindroos Veikko Lindroos Professor (Author) · William Andrew 2015-11-02, · Hardcover

Handbook of Silicon Based Mems Materials and Technologies (Micro & Nano Technologies) (Micro and Nano Technologies) - Markku Tilli Mervi Paulasto-Krockel Teruaki Motooka Professor Veikko Lindroos Veikko Lindroos Professor

New Book Imported to Austria
Delivery: 23 Sep - 28 Sep Shipping: 11 to 13 business days.
285,55 €
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285,55 €

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Synopsis "Handbook of Silicon Based Mems Materials and Technologies (Micro & Nano Technologies) (Micro and Nano Technologies)"

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.

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