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portada Handbook of Silicon Semiconductor Metrology
Type
Physical Book
Publisher
Author
Language
English
Format
Paperback
ISBN13
9780367397166

Handbook of Silicon Semiconductor Metrology

Alain C. Diebold (Author) · Crc Pr Inc · Paperback

Handbook of Silicon Semiconductor Metrology - Alain C. Diebold

New Book Imported to Austria
Delivery: 10 Dec - 14 Dec Shipping: 13 to 14 business days.
126,44 €
Import costs and 10% VAT included in the price ✅
126,44 €

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Synopsis "Handbook of Silicon Semiconductor Metrology "

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

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The book is written in English.

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The binding of this edition is Paperback.

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