Name: Micro Electronic and Mechanical Systems
Price: 183.78 EUR
Availability: InStock
Author: Takahata, Kenichi
ISBN: 9789533070278

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portada Micro Electronic and Mechanical Systems

Type

Physical Book

Publisher

Intechopen

Author

Takahata, Kenichi

Language

English

Pages

528

Format

Hardcover

Dimensions

24.4 x 17.0 x 2.9 cm

Weight

1.03 kg.

ISBN13

9789533070278

Synopsis "Micro Electronic and Mechanical Systems"

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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Micro Electronic and Mechanical Systems - Takahata, Kenichi

Synopsis "Micro Electronic and Mechanical Systems"

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